Because of the integration of all of parts in silicon and its inherent simplicity, it can be made very inexpensively.ġ. The design allows for good sensitivity, due to the substantial swing of the outer oscillator, its high moment of inertia, excellent Si spring characteristics, and excellent sensitivity of the torsional sensors. These inner hinges are likewise equipped with a four-terminal piezo voltage torsion sensor, giving an indication of the rate of rotation of the sensor. Rotation of the axis of oscillation of the outer body causes the moving mass and the inner frame to tilt and oscillate at the outer frequency due to Coriolis forces, thereby periodically deforming the inner hinges in torsion. The inner frame itself is connected to a fixed inner post, by a set of torsion hinges, defining an axis of rotation perpendicular to the first axis. Users should refer to the original published version of the material for the full abstract.A monolithic single crystal Si rate-gyro consisting of in the preferred embodiment, an outer torsional frame, self resonating with a substantial amplitude, as controlled by a four-terminal piezo torsion sensor, connected to an inner frame by torsional hinges. No warranty is given about the accuracy of the copy. However, users may print, download, or email articles for individual use. Copyright of Sensors (14248220) is the property of MDPI and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission.The feasibility of the high-temperature sintering method is proved by experiments. Through the open-loop and closed-loop tests, the performance parameters of gyroscope are obtained. A complete gyroscope is obtained by vacuum packaging the sintered resonator. After sintering, results of the acoustic excitation experiment and piezoelectric excitation experiment are tested, and the influence of the sintered PCEs on the CQR is determined. To achieve this goal, a novel high-temperature sintering method is proposed to combine the CQR and the PCEs, and the corresponding sintered resonators are fabricated. In order to develop a high-precision Cylindrical shell piezoelectric vibration gyroscope, it is very important to reduce the influence of the PCEs and obtain a high-quality-factor CQR. Its core components are the cylindrical quartz resonator (CQR) and the piezoelectric ceramic electrodes (PCEs). Abstract: A cylindrical shell piezoelectric vibration gyroscope is a kind of Coriolis vibration gyroscope.
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